Dr. Wen Cebuhar, PhD
Consulting Engineer
Research Interests
Publications
Approximation procedures for the optimal control of bilinear and nonlinear systems
Journal of Optimization Theory and Applications / Aug 01, 1984
Cebuhar, W. A., & Costanza, V. (1984). Approximation procedures for the optimal control of bilinear and nonlinear systems. Journal of Optimization Theory and Applications, 43(4), 615–627. https://doi.org/10.1007/bf00935009
Dynamic output feedback regulation for a class of nonlinear systems
Mathematics of Control, Signals, and Systems / Jun 01, 1993
Pomet, J.-B., Hirschorn, R. M., & Cebuhar, W. A. (1993). Dynamic output feedback regulation for a class of nonlinear systems. Mathematics of Control, Signals, and Systems, 6(2), 106–124. https://doi.org/10.1007/bf01211742
Nonlinear control of CSTR's
Chemical Engineering Science / Jan 01, 1984
Cebuhar, W. A., & Costanza, V. (1984). Nonlinear control of CSTR’s. Chemical Engineering Science, 39(12), 1715–1722. https://doi.org/10.1016/0009-2509(84)80105-0
Achieving mask-based imaging with optical maskless lithography
SPIE Proceedings / Mar 10, 2006
Stone, E. M., Hintersteiner, J. D., Cebuhar, W. A., Albright, R., Eib, N. K., Latypov, A., Baba-Ali, N., Poultney, S. K., & Croffie, E. H. (2006). Achieving mask-based imaging with optical maskless lithography. Emerging Lithographic Technologies X. https://doi.org/10.1117/12.658690
Optical rasterization algorithms for contrast devices utilizing different physical modulation principles in optical maskless lithography
SPIE Proceedings / May 06, 2005
Latypov, A., Albright, R., BabaAli, N., Cebuhar, W. A., Hintersteiner, J. D., & Stone, E. (2005). Optical rasterization algorithms for contrast devices utilizing different physical modulation principles in optical maskless lithography. Emerging Lithographic Technologies IX. https://doi.org/10.1117/12.600241
Fabrication method for elastomer spatial light modulators for short wavelength maskless lithography
Sensors and Actuators A: Physical / Sep 01, 2004
Wang, J.-S., Jung, I. W., & Solgaard, O. (2004). Fabrication method for elastomer spatial light modulators for short wavelength maskless lithography. Sensors and Actuators A: Physical, 114(2–3), 528–535. https://doi.org/10.1016/j.sna.2003.12.001
Research on the Factors of Independent Innovation Pattern Based on Patent Data Measurement
2011 International Conference on Management and Service Science / Aug 01, 2011
Yang, W., & Wu, H. (2011). Research on the Factors of Independent Innovation Pattern Based on Patent Data Measurement. 2011 International Conference on Management and Service Science. https://doi.org/10.1109/icmss.2011.5998896
Method and apparatus for vibration detection, method and apparatus for vibration analysis, lithographic apparatus, device manufacturing method, and computer program
The Journal of the Acoustical Society of America / Jan 01, 2008
Kok, H. V. (2008). Method and apparatus for vibration detection, method and apparatus for vibration analysis, lithographic apparatus, device manufacturing method, and computer program. The Journal of the Acoustical Society of America, 123(5), 2468. https://doi.org/10.1121/1.2921173
APPROXIMATE LINEARIZATION OF CONTROL SYSTEMS WITH DISCONTINUOUS NON‐LINEARITIES
Optimal Control Applications and Methods / Oct 01, 1995
Cebuhar, W. A. (1995). APPROXIMATE LINEARIZATION OF CONTROL SYSTEMS WITH DISCONTINUOUS NON‐LINEARITIES. Optimal Control Applications and Methods, 16(5), 341–359. Portico. https://doi.org/10.1002/j.1099-1514.1995.tb00025.x
US Patent History
World Patent Information / Mar 01, 2007
US Patent History. (2007). World Patent Information, 29(1), 67. https://doi.org/10.1016/j.wpi.2006.10.007
Some results on dynamic output feedback regulation of nonlinear systems
[1991] Proceedings of the 30th IEEE Conference on Decision and Control
Cebuhar, W., Hirschorn, R., & Pomet, J.-B. (n.d.). Some results on dynamic output feedback regulation of nonlinear systems. [1991] Proceedings of the 30th IEEE Conference on Decision and Control. https://doi.org/10.1109/cdc.1991.261722
Optimal compensation of nonlinearities in the presence of noise
Systems & Control Letters / Nov 01, 1991
Brockett, R. W., & Cebuhar, W. A. (1991). Optimal compensation of nonlinearities in the presence of noise. Systems & Control Letters, 17(5), 375–381. https://doi.org/10.1016/0167-6911(91)90137-4
Education
Harvard University
Applied Mathematics / June, 1989
Experience
ASML
Senior Design Engineer / August, 1999 — August, 2021
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